Fig. 4
Terahertz sensing applications. a 3D MTM for pressure sensing applications b The relationship diagram between the cantilever bending Angle and the induced bending force59. c Detailed schematic diagrams and ETA simulation diagrams of TTM and unit cells based on MEMS. d The electromagnetic responses of TTM exposed to the surrounding environment with different refractive indices under different modes76. e 3D view of the detector with dual-material microcantilevers and metasurface absorbers. f Side view of the double-material micro cantilever. Simulated thermomechanical response degrees of dual-material microcantilevers with different thickness ratios. g The measurement response of the detector68. Reprinted with permission from refs. 59,68,76
