Fig. 5
Terahertz frequency and polarization tuning applications. a Schematic diagram and manufacturing process of MEMS reconfigurable TMA b Absorption spectra with different incident polarization angles c The resonance and refraction relationship diagram of TMA based on MEMS70 d Schematic diagram of counterclockwise helical cantilever structure. e SEM image f Schematic diagram and test diagram of the THz-TDS system54. Reprinted with permission from refs. 54,70
