Fig. 6 | Microsystems & Nanoengineering

Fig. 6

From: Terahertz MEMS actuators and applications

Fig. 6

Terahertz beam forming applications. a The explosion diagram of MTM, schematic diagram of the unit cell structure b Simulate the far-field scattering mode of metasurface arrays with different air gaps71. c Illustration of the reflection array. d The radiation pattern of 0.6 THz terahertz waves reflected by the grating. Each grating period has two, three, four and five reflection beams respectively101. Reprinted with permission from refs. 71,101

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