Fig. 7
Terahertz logical operations applications. a SEM image of CSM device b Logic voltage drive response curve graph103 c Schematic diagram of wine-shaped cantilever based on MEMS. d SEM images of WCM devices based on MEMS e Programmable devices are functionalized as logic gate signals67 f Schematic diagram of optical logic devices g The dual-input logic gate function implemented by CSM devices53. Reprinted with permission from refs. 53,67,103
