Table 1 Comparison of multimodal implantable Si- and fiber-based neural probes with light emission, electrophysiological recording, and microfluidic functionalities
Device design | Implant cross-sectional area | No. of electrodes | No. of emitters | No. of microfluidic channels | Cross-sectional area of the channel | Ref. |
|---|---|---|---|---|---|---|
Four-shank Si probe | 128 μm × 40 μm × 4 shanks | 32 (8/shank) | 1 polymer waveguide | 1 multi-cavity channel | 10 μm × 12 μm for each cavity | |
Assembly of a glass fiber and a Si probe | 150 μm × 50 μm + 225-μm diameter fiber | 32 | 1 fiber core | 1 | 11 μm × < 5 μm | |
Polymer fiber neural probe | ≈160 μm diameter | 4 | 8 fiber cores | 1 | ≈80-μm diameter | |
Polymer fiber neural probe | 306 μm × 342 μm | 6 | 1 fiber core | 1 | 100 μm × 40 μm | |
Si nanophotonic neural probe | 107 μm × 100 μm | 18 | 16 SiN grating coupler emitters | 1 | ≈160 μm2 | This work |
