Fig. 2: Fabrication of SAW sensor devices and their performances.
From: High sensitivity SAW hydrogen gas sensor based on thermal conductivity effect
a The wafer of the thermal conductivity-based SAW sensor, (b) the structure of the SAW chip and IDTs, (c) the phase response of the SAW device, (d) the working temperature and power consumption of the SAW device under different heating voltages, (e) phase shift comparison between simulation and experiment at different working temperatures
