Fig. 9: The surface roughness of the laminated film.

a 2D AFM image of [Ta (5 nm)/Ni₇₇Fe₁₄Cu₅Mo₄ (50 nm)] × 6/Ta (5 nm) at a sputtering power of 100 W. b The relationship between the surface roughness of [Ta (5 nm)/Ni₇₇Fe₁₄Cu₅Mo₄ (50 nm)] × 6/Ta (5 nm) and the sputtering power