Table 1 Comparison of modulation efficiency of different types of magnetoresistive-MEMS hybrid magnetic sensors

From: A laminated magnetic flux concentrator with low coercivity and high relative permeability for efficient flux modulation in MEMS magnetoresistive sensors

Modulation Schemes

Magnetioresistive Elements

Modulation Efficiency (%)

Micro-cantilever34

GMR

0.11

Micro-torsionator39

MTJ

11

Piezoelectric resonator49

GMR

13

VMFM37

MTJ

36

MTJ motion modulation36

MTJ

8.69

TDSMM (this work)

MTJ

65.4

Back to article page