Table 2 Performance comparison of different MFCs in the magnetoresistive-MEMS hybrid magnetic sensor

From: A laminated magnetic flux concentrator with low coercivity and high relative permeability for efficient flux modulation in MEMS magnetoresistive sensors

Soft magnetic alloy

Coercivity

Relative permeability

Thickness

Co93Zr3Nb431

0.75 Oe

853

350–400 nm

(Co70Fe30)80B2050

4.7 Oe

203

680 nm

Ni70Fe3025

1.6 Oe

1700

1.2 μm

Ni77Fe14Cu5Mo4 (this work)

0.01 Oe

3246

400 nm

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