Fig. 5: High-temperature and high-pressure performance of the FPIA.

a Acceleration response across different temperatures. b The response of the FPIA at different accelerations under 350 °C. c Dynamic performance of the FPIA at 350 °C. d Sensitivity and the initial cavity length at different temperatures. e Cross-axis response of the FPIA at 350 °C. f Stability test results of the FPIA