Fig. 2: Diagrams of deformation in pressure-sensitive diaphragms. | Microsystems & Nanoengineering

Fig. 2: Diagrams of deformation in pressure-sensitive diaphragms.

From: All-sapphire-based high-temperature pressure sensor system with in situ temperature compensation: innovative cavity design, fabrication, and APSC-FFT algorithm

Fig. 2: Diagrams of deformation in pressure-sensitive diaphragms.The alternative text for this image may have been generated using AI.

a Air cavity variation, b deformation at PV = 0–2 μm, c single-cavity reflection spectra under deformation at PV = 0–2 μm, d diaphragm with pedestal-shaped structure, e diaphragm of planar

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