Fig. 3: Development of a PMUT array for wearable application.

a Schematic of the ultra-narrow PMUT array with high wearability. b Simulated acoustic field distributions of PMUT arrays with different aspect ratios (AR). c Pressure profiles along the x, y, and z lines through the focus point (20 mm from the device surface). d Optical image of the fabricated miniature and wearable PMUT array with the AR = 7:1