Fig. 3
From: Silicon single-photon avalanche diodes with nano-structured light trapping
EQE measurement. a EQE measurements of 500 μm diameter control (blue solid) and light-trapping SPADs (red solid); dashed black lines correspond to theoretical absorption of 3, 12, and 25 μm thick Si from left to right. b EQE enhancement: ratio of light-trapping SPAD EQE compared to control SPAD EQE at different wavelengths
