Fig. 6 | Nature Communications

Fig. 6

From: Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition

Fig. 6The alternative text for this image may have been generated using AI.

Precise control of coverage of Pt nanoparticles using ALD. Tuning the particle coverage at a fixed Pt loading by combining 0 (sample A), 20 (sample B), 30 (sample C), and 40 (sample D) O2-based Pt ALD cycles with 60 (sample A), 40 (sample B), 30 (sample C), and 20 (sample D) N2 *-based Pt ALD cycles. a ALD recipe scheme. For clarity, fewer than the real number of ALD cycles are schematically represented. b Experimental 2D GISAXS images. The dashed vertical lines indicate the q y-position of the main scattering lobe. c Schematic representations of the GISAXS results. The Pt loading, mean center-to-center particle distance 〈D〉, average particle width 〈W〉, and average particle height 〈H〉 are indicated. d SEM images with 50 nm scale bars

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