Fig. 4
From: Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy
Estimation of the angular dispersion of the fabricated MBGs. a Schematic of the diffraction geometry of the gratings. b, c Two-dimensional diffraction measurements as a function of diffraction angle and photon energy of the +1st order of the Mo/Si MBG at an incident angle of 5° and the −4th order of the Cr/C MBG at an incident angle of 75°, respectively
