Fig. 4
Temperature dependent changes in trap states. a Core level O 1s spectra from different temperature heated film. Thick arrow indicate movement of the peaks obtained from samples heated with different temperatures. b–d Core level oxygen peaks from as-prepared, 200 and 400 °C heated ALPO films, respectively. The oxygen peak (red) in each case is de-convoluted into three components corresponding to oxygen vacancies (M-Ovac) is green, lattice oxygen (M-O) is blue, and metal hydroxide (M-OH) is cyan. e Atomic composition ratios of oxygen in ALPO thin films as a function of temperature. (inset) increment of traps OVAC at 200 °C with respect to AP ALPO film. f Schematics showing condensation mechanism of oxide precursors by heating. The first block denotes the individual molecules, second and third are low and high temperature processed ALPO films, respectively. All molecular models were constructed using MolView (http://molview.org/). Escape of water molecules (black circle) shown in third block leads to the decrease in the trap states as well as the decrease of the thickness of the film
