Fig. 4
From: Triple nitrogen-vacancy centre fabrication by C5N4Hn ion implantation
Features of the C5N4Hn ions from the adenine ion source. a Mass spectrum of ions from the adenine ion source. A C5N4Hn ion was used in this study. The mass of C5N4Hn was evaluated to be 118.2 ± 1.4 u. b Vacancy and nitrogen atom distributions calculated with the SRIM code. The dashed and solid grey lines show the distributions of vacancies created by the nitrogen and C5N4Hn=1 ions. The solid black line shows the position of the implanted nitrogen atom. c The separation distance distribution between two nitrogen atoms when two nitrogen ions are implanted at the same point. The average distance and standard deviation of the implanted nitrogen atom were calculated to be 9 and 4 nm, respectively
