Fig. 3
From: Isolating hydrogen in hexagonal boron nitride bubbles by a plasma treatment
Influence of the plasma treatment duration and sample temperature on the dimensions of the bubbles. a Density and relative fractions of h-BN bubbles within three diameter ranges (0–1 μm, 1–3 μm, and >3 μm) produced by different H-plasma treatment durations; all samples were treated under the typical experimental conditions (100 W RF, 350 °C, 3 sccm H2, ~3 Pa). b Dimension distributions of the h-BN bubbles produced after H-plasma treatment for 90, 120, and 150 min. c Density and relative fractions of h-BN bubbles within four diameter ranges (<100 nm, 0.1–1 μm, 1–2 μm, and >2 μm) produced from treatment at different sample temperatures (30, 150, 250 and 350 °C); the other conditions were not changed (100 W RF, 120 minutes, 3 sccm H2, ~3 Pa). d hmax of the bubbles produced by the H-plasma and the aspect ratio of the bubbles with respect to the bubble diameter. The inset shows an illustration of hmax and R
