Fig. 3

Mechanism investigation on the control of RIE-induced nanostructures. a The binding energy of the Si 2p peak and fitted components. Top: as-prepared PDMS. Bottom, the RIE-treated PDMS. b The storage modulus of PDMS after the thermal pretreatment. The pretreatment condition for PDMS with different weight ratios of the base to curing agent: 80 °C, 80 min. The thermal pretreatment condition for PDMS with a 10:1 weight ratio: 80 °C and varied time