Table 1 Mass, position and variance of the deposited mass evaluated by SEM and calculated with the inertial imaging approach using (primary) Lorentzian resonance and weak-coupling peak shifts

From: Large-scale parallelization of nanomechanical mass spectrometry with weakly-coupled resonators

Sample

Position 1

Position 2

Position 3

Mass (SEM) (pg)

42.07 (±20%)

50.59 (±21%)

37.94 (±19%)

Mass (Lorentzian) (pg)

42.51 (±2.05%)

54.14 (±1.17%)

48.65 (±1.17%)

Mass (weak-coupling) (pg)

42.98 (±4.26%)

55.32 (±2.3%)

42.16 (±3.15%)

Position (SEM)

0.98

0.75

0.5

Position (Lorentzian)

0.981 (±0.05%)

0.749 (±0.43%)

0.494 (±0.41%)

Position (weak-coupling)

0.980 (±0.55%)

0.745 (±0.51%)

0.491 (±0.88%)

Variance (SEM)

1.18 × 10−5

1.11 × 10−5

8.09 x 10−6

Variance (Lorentzian)

9.38 × 10−6 (±5.2%)

1.44 × 10−5 (±7.6%)

9.67 × 10−7 (±32%)

Variance (weak-coupling)

1.78 × 10−5 (±36.1%)

1.32 × 10−5 (±10.8%)

1.125 × 10−6 (±29.1%)

  1. SEM reported mass uses measured geometric dimensions and platinum density. Position 1 = 0.98, Position 2 = 0.75, Position 3 = 0.5, scaled relative to the cantilever length and relative to the clamp
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