Fig. 2: Scanning electron microscopic (SEM) image of a fabricated EOM device.
From: Lithium niobate photonic-crystal electro-optic modulator
a Full SEM image of the whole-device structure. The region highlighted in red is the electrode used to drive the photonic-crystal nanoresonator. That highlighted in blue indicates the large metal pad used for contacting the RF probe. The green region indicates the electrode that can be shrunk to in the future design. b Zoom-in image of the photonic-crystal resonator and electrodes, corresponding to the dashed rectangular region in a. c Further zoom-in image showing the detailed structure of the photonic-crystal defects cavity, corresponding to the dashed rectangular region in b.
