Fig. 1: Schematic of microbeam surface X-ray scattering during organo-metallic vapor phase epitaxy (OMVPE) growth.
From: In situ microbeam surface X-ray scattering reveals alternating step kinetics during crystal growth
Crystal truncation rod (CTR) measurements are sensitive to the α or β terrace fraction changes that occur on vicinal {0001} surfaces of HCP-type crystals during deposition or evaporation. Calculated reflectivities are shown for the CTRs from the \((01\overline{1}1)\) and \((01\overline{1}2)\) Bragg peaks (red and blue curves, respectively) with α terrace fractions fα = 0.1 and 0.9 typical for evaporation and deposition of GaN by OMVPE, as will be shown below.
