Table 1 Growth conditions studied.

From: In situ microbeam surface X-ray scattering reveals alternating step kinetics during crystal growth

Growth condition index

TEGa flow (μmol min−1)

H2 frac. in carrier (%)

Net growth rate G (monolayer s−1)

 

Measured values from CTR fits

Best fit from BCF model

1

0.000

50

−0.0018

\({f}_{{\rm{\alpha }}}^{{\rm{ss}}}\)

   0.111 ± 0.013

0.136

2

0.000

0

   0.0000

\({f}_{{\rm{\alpha }}}^{{\rm{ss}}}\)

 0.461 ± 0.018

0.440

3

0.033

50

   0.0109

\({f}_{{\rm{\alpha }}}^{{\rm{ss}}}\)

  0.811 ± 0.014

0.836

4

0.033

0

   0.0127

\({f}_{{\rm{\alpha }}}^{{\rm{ss}}}\)

0.868 ± 0.011

0.847

1–2

   

trel

 2200 ± 200 s

2478

2–4

   

trel

   340 ± 30 s

331

  1. Also given are values of steady state terrace fraction \({f}_{{\rm{\alpha }}}^{{\rm{ss}}}\) obtained from fits to measured CTR intensities (shown in Fig. 5), values of relaxation time trel of fα upon changing conditions (shown in Fig. 6), and corresponding values from the BCF model fit (shown in Fig. 8).