Fig. 5: Design analysis.
From: Ultra-coherent nanomechanical resonators based on inverse design
a Bending loss distribution of D1 on a logarithmic scale. The inset highlights the high bending losses at the boundary. b Static von Mises distribution. The bars indicate the direction of the first principal stress component. c Numerically predicted intrinsic quality factor Qint partitioned into boundary (Qbound) and distributed (Qdist) bending losses with \({Q}_{{{{{{{{\rm{int}}}}}}}}}^{-1}={Q}_{{{{{{{{\rm{bound}}}}}}}}}^{-1}+{Q}_{{{{{{{{\rm{dist}}}}}}}}}^{-1}\).
