Fig. 5: SEM images of double layered grid HSQ microstructure by FsLDW before and after thermal treatment. | Nature Communications

Fig. 5: SEM images of double layered grid HSQ microstructure by FsLDW before and after thermal treatment.

From: λ/30 inorganic features achieved by multi-photon 3D lithography

Fig. 5

a–d are SEM images of the HSQ microstructure before thermal treatment. a′–d′, a″–d″, and a‴–d‴ are SEM images of the HSQ microstructure after thermal treatment at 400, 500, and 600 °C, respectively. The insets in a–a‴, c–c‴ are the high-magnification details. The red dashed circles point out the slight decomposition of the 3D HSQ microstructure.

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