Fig. 3: 6-inch wafer scale fabrication of integrated inorganic TFT arrays and whole transfer thereof to elastomer. | Nature Communications

Fig. 3: 6-inch wafer scale fabrication of integrated inorganic TFT arrays and whole transfer thereof to elastomer.

From: High density integration of stretchable inorganic thin film transistors with excellent performance and reliability

Fig. 3: 6-inch wafer scale fabrication of integrated inorganic TFT arrays and whole transfer thereof to elastomer.The alternative text for this image may have been generated using AI.

a TFTs arrayed in serpentine form on the PI substrate. b Top PI coating over the TFTs with the same thickness as the bottom PI to place devices in a neutral plane. c Etch out of two PI coatings in serpentine form. d, e Detachment of PI cladded devices by the LLO technique and transfer thereof to elastomer.

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