Fig. 3: M-SLR mode of the 1D MoS₂ grating.

a Schematic structure of MoS₂ grating on the glass substrate. \({{{{{{\bf{k}}}}}}}_{x}\) and \({{{{{{\bf{k}}}}}}}_{y}\) are in-plane components of the incident wavevector \({{{{{\bf{k}}}}}}\) in \(x\)- and \(y\)- directions. TM is short for transverse-magnetic polarization and TE is short for transverse-electric polarization. b SEM images for 1D MoS₂ gratings (A1-A3 regions). All black scale bars represent 1 μm. c Measured (bottom) and simulated (top) extinction spectra under TM-polarized incidence for A1-A3 regions. Red, green, and blue arrows indicate the magnetic-surface lattice resonance (M-SLR) modes of A1-A3, where the spatial distributions of the electric and magnetic (\(x\)-component) fields at M-SLR are shown in the insets. The white arrow represents the real part of vectorial electric field projected in the \({yz}\)-plane. d Simulated extinction spectra for 1D dielectric gratings embedded in a homogeneous environment (\(n\)= 1.46). Different extinction coefficients κ (from 0 to 0.2) of dielectric material are adopted in the calculation. Black dashed-dotted lines are fitting curves based on the formula in ref. 55 (here only κ = 0 and κ = 0.2 are shown for clarity). In the simulation, the height and width of the grating bar are chosen as 100 nm and 110 nm separately to match the geometric parameters of A1. e Extracted linewidth \(\gamma\) as a function of the material loss \(\kappa\) from the fitting results in (c). The yellow star indicates the linewidth of the M-SLR mode from A1 region.