Fig. 5: Schematic of the proposed miniature linear OSSPSU motor and the velocity performance for the OSSPSU motors.

a Basic design of the miniature linear ultrasonic OSSPSU motor. b The relationship between the bidirectional motion velocities of [001]-PIMNT crystal-OSSPSU motor and the applied voltage and load. c The relationship between the bidirectional motion velocities of hard ceramic-OSSPSU motor and the applied voltage and load. d Comparison of the velocity performance for [001]-PIMNT crystal and hard ceramic-OSSPSU motors under the same conditions. e Plot of the velocities of [001]-PIMNT crystal-OSSPSU motor (at 150 VP-P) and hard ceramic-OSSPSU motor (at 250 VP-P) versus the load. The error bars in b, c, and e represent the standard deviations of the values of each motor measured three times under the same conditions.