Fig. 4: Fabrication of complex 3D nanostructures using 36 − 400 foci. | Nature Communications

Fig. 4: Fabrication of complex 3D nanostructures using 36 − 400 foci.

From: Ultrafast 3D nanofabrication via digital holography

Fig. 4: Fabrication of complex 3D nanostructures using 36 − 400 foci.The alternative text for this image may have been generated using AI.

a–c Meta-structures printed by 64, 100, and 400 foci, respectively (with an average pulse energy per focus of 5 nJ). d Designed alphabets and numbers to be printed with different laser intensities. e Image of in situ 36-focus fabrication. f SEM image of the fabrication results of (e). g, h Optical images of a “CUHK” pattern consisting of nano-dot arrays with a period of 4 μm; the mono- or rainbow-color effects are induced by the reflection / diffraction of light. i Zoom-in view of the red box in g; j Array of annular structures formed by woodpile sub-units. k Array of self-supported egg-beater micro-structures. l Array of micro-lenses. m Magnetic micro-gear, and n time-lapse image of the micro-gear driven by a magnetic field. Scale bars are 50 μm for (a–c); 10 μm for (f) and i–m; and 1 cm for (g) and h.

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