Fig. 2: HAADF-STEM characterization.
From: Interface-engineered ferroelectricity of epitaxial Hf0.5Zr0.5O2 thin films
a Cross-section image and atomically resolved EDX for A-type heterostructure. b Cross-section image and atomically resolved EDX for B-type heterostructure, which are observed along the [110] zone of the substrate. Mn, La, and Hf atoms in the EDX maps are seen in red, green, and blue colors, respectively. c, d Layer-resolved EELS spectra of Mn-L2,3 edge for c A-type and d B-type heterostructures. Arrows indicate the scan direction. Dashed lines mark the Mn-L2,3 peak positions. The blue area between the dashed lines indicates the energy loss shift of the Mn-L edge.
