Fig. 6: Experimental demonstration of high-Q resonances based on GMs.
From: Ultrahigh-Q guided mode resonances in an All-dielectric metasurface
a Schematic drawing of a 3D meta-waveguide system. The top perturbation is patterned as photonic crystal slab with air hole. b SEM image of a fabricated meta-waveguide system. The scale bar in white is 200 nm. c Eigenfield distribution for GMR TE311. d Measured reflection spectra for four fabricated samples with fixed period 545 nm but varied hole radius from 72 nm to 105 nm. e Fano-fitting for reflection spectrum for hole radius R = 72 nm. f Retrieved Q-factors vs radius for mode TE311, dash line is the simulated Q-factor. g Measured reflection spectra for a meta-waveguide system when periods change from 535 nm to 555 nm. h Comparison between calculated and measured resonant wavelength. i Retrieved Q-factors vs period. a.u in the figure the abbreviation of arbitrary units.
