Fig. 6: VKB beam caustics.
The beam Intensity distribution after numerical propagation of the measured complex field to the intended focal positions of (a) VKB at 235 mm (b) VKB with aligned AXL2 at 235 mm, and when defocus and coma aberrations are minimised (c) and (d) VKB with AXL2 at 235 mm \(\sim \mp\)2 mm, after shearing of AXL structures \(\triangle\) = \(\mp\)15 µm and \(\triangle\) = \(\pm\)15 µm, and VKB pitch angle offset \(\delta \theta\) = \(\mp\)72 µrad, respectively.
