Fig. 2: Measurement of SPE position with subwavelength accuracy.

a Optical image acquired by illuminating the sample simultaneously by a HeNe laser and 10 nm band pass filtered light from a halogen lamp. The circular spot corresponds to PL from an SPE. b, c Selected X- and Y-line cuts of the camera image taken through the alignment mark and SPE (dots), with respective Gaussian fits (blue and red curves). Signals are not normalized. d AFM topography image of the same region, with the red circle indicating the laser-illuminated nanoindent. Color scale represents the height. e, f Selected X- and Y-line cuts of the AFM scan taken through the alignment mark, with Gaussian fits (blue curves). Vertical dashed lines indicate the extracted coordinates.