Fig. 6: The accuracy and precision of robotic-OCT-guided laser ablation on target areas.
From: Robotic-OCT guided inspection and microsurgery of monolithic storage devices
a Absolute mean error for center positions of the ablation holes in the X (fast-axis) direction, indicating an accuracy of 52 μm (n = 18 samples per trial). b Center position distribution for the ablation holes in the X (fast-axis) direction, indicating a precision of ±10 μm (n = 18 samples per trial). c Absolute mean error for center positions of the ablation holes in the Y (slow-axis) direction, indicating an accuracy of 50 μm (n = 18 samples per trial). d Center position distribution for the ablation holes in the Y (slow-axis) direction, indicating a precision of ±11 μm (n = 18 samples per trial). For all box plots, center lines represent the median, the length of the box extends from the lower quartile to the upper quartile, whiskers are 1.5 times of interquartile range and red cross indicates outlier.
