Fig. 1: Micromechanically resonant programmable photonic integrated circuits.

a Schematic render of a programmable photonic integrated circuit actuated with only periodic sinusoidal driving signals. The optical output channels switch periodically in time, as illustrated by the time stamps t = nT … t = T(n + 1). b Diagram of circuit components, consisting of Mach-Zehnder interferometer (MZI) switches and direct phase modulators with reconfigurable phases \(\theta\) and \(\phi\) respectively. c Finite-element render of a micromechanical optical phase shifter implemented as a piezo-actuated cantilever. d Theoretical modulator response and enhancement (Eq. 3) of a phase shifter with a single mechanical resonance where \({\omega }_{0}\) = 10 MHz and \({Q}_{m}\,\)= 40.