Fig. 5: FEM simulations and agreement with experiments.
From: Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios
a, b A-posteriori 2D COMSOL® simulations of the devices shown in Fig. 3 and agreement with the experimental data in predicting \({k}_{t}^{2}\) a and fs b. The error bars show the maximum and minimum measured value per data point. In c, COMSOL® simulations of \({k}_{t}^{2}\) as function of Sc-doping of the piezoelectric film for different metal electrodes are provided. The simulated device has an h/λ ratio of 0.4. The IDT thicknesses are 95, 30, 40, and 70 nm for Al, Pt, W, and Mo, respectively. This optimal values were found via COMSOL® FEM.
