Table 1 Comparison of the main commercial RF MEMS resonator technologies and the LFE CLMR presented in this work
From: Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios
Trad. SAW8 | TC-SAW11 | FBAR17 | SMR28 | XBAW27 | CLMR (This work) | ||
|---|---|---|---|---|---|---|---|
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Substrate | LN/LT | LN/LT | LN/LT | AlN/ScAlN | AlN/ScAlN | AlN/ScAlN | AlN/ScAlN |
CMOS compatibility | No | No | No | Yes | Yes | Yes | Yes |
Litho tunability | Yes | Yes | Yes | No | No | No | Yes |
Cost | Low | Medium | High | High | Medium | High | Low |
Fab. complexity | Low | Low | Low | High | High | High | Low |
Max. freq. | < 4 GHz | < 4 GHz | < 4 GHz | < 6 GHz commercially | < 6 GHz | < 6 GHz | > 10 GHz |
