Fig. 3: Fabricated ITiO-gated MOSCAP Si-MRM.
From: Sub-volt high-speed silicon MOSCAP microring modulator driven by high-mobility conductive oxide
a SEM image of the passive Si microring resonator fabricated by Intel’s photonics fab, showing the etched SiO2 top cladding in the active region after RIE. b Top-view SEM image highlighting the narrow Si microring waveguide. c Optical image of the fabricated ITiO-gated MOSCAP Si-MRM with high-speed Ni/Au electrodes. d SEM image of the fabricated ITiO-gated MOSCAP Si-MRM with false colors.
