Fig. 2: Schematics of the top-down deposition process to fabricate olfactory receptor-like sensor array. | Nature Communications

Fig. 2: Schematics of the top-down deposition process to fabricate olfactory receptor-like sensor array.

From: Data-centric artificial olfactory system based on the eigengraph

Fig. 2: Schematics of the top-down deposition process to fabricate olfactory receptor-like sensor array.The alt text for this image may have been generated using AI.

a Combinatorial design strategy of individual sensor based on the SnO2 nanorods functionalized with composite nanocatalyst composed of noble metal (Au) and transition metal oxide (CuO) using GLAD of electron beam evaporation. b Wafer-scale mass production through semiconductor process for depositing SnO2 nanorods and bimetallic catalysts including noble metals (Pt, Pd, Au) and transition metals (Co, Ni, Cu) assisted by the spatially addressable shadow masks.

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