Fig. 3: Layout and micrographs of the silicon photonics beamformer chip.
From: Ultrabroadband high-resolution silicon RF-photonic beamformer
a GDS layout with the optical elements from the 1 × 8 equalized beamformer. b Micrograph of the silicon photonics chip, including electrical connections (8 mm × 3 mm). The three different parts are highlighted in color boxes (c) Zoom of the 1 × 8 tunable splitter tree. d Zoom of the optional pre-compensating delay line unit as an additional bit. e Zoom of the eight 5-bit OTTDLs stage.
