Fig. 1: High operation stability of the robust substrate-integrated uFTEs with the tri-system integration.

a A schematic diagram exhibiting the fabrication process of the substrate-integrated uFTEs with greatly thin <0.5 μm containing the tri-system integration in the nanocomposite via the iSPM. b The photo of the uFTE (4 cm2) floating on the surface of the water getting lifted by a needle. c, Real-time monitoring of the operational current density of uFTEs according to with (blue) and without (black) the tri-system integration against the simultaneous multi-loading fatigue tests such as the initial 8.4 MA cm−2 and 10,000 cycles of repetitive folding (lasting for about 4 hours) with a folding radius of 500 μm under the humid condition of relative humidity 85 %.