Fig. 2: Fabrication of defect implanted hBN metasurfaces.
From: Optically addressable spin defects coupled to bound states in the continuum metasurfaces
a Fabrication process of the defect implanted hBN metasurfaces including hBN exfoliation from single crystals (i), electron beam lithography and reactive ion etching (ii), and nitrogen ion beam implantation of VB- defects (iii) (see Methods). b Electron microscope image of spin-active hBN metasurface. c Bright field image of hBN metasurfaces with different scaling factors. Each square represents a single metasurface, and the brighter parts are leftover material of the pristine hBN layer. d Transmission spectra of the different hBN metasurfaces. The scaling factor varies from 1.23 to 1.5, exhibiting a redshift of the qBIC resonance with increasing unit cell size. The line colors correspond to the metasurfaces marked with the same color in the sample image in panel (c). e qBIC resonance spectrum for excitation under parallel (orange) and perpendicular (black) linear polarization.
