Fig. 2: XPS of the 6-nm-thick HfO2 films with different doping conditions.
From: Enhanced polarization switching characteristics of HfO2 ultrathin films via acceptor-donor co-doping
a Hf 4 f spectra comparing pure HfO2 and HfO2-based films with different doping states. b Ta 4 f and Hf 5p spectra of LT:HfO2 and Ta:HfO2 films. c La 3d spectra of La:HfO2 and LT:HfO2 films.
