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a Resistivities versus thickness. b Grain size versus thickness. c Comparison of the resistivities of Nb25Mo25Ta25W25, Nb15Mo15Ta35W35, and Nb15Mo35Ta15W35 films with those of other high entropy alloy films in the literature6,9,11,12,26,27,28,29,30,31,32,33,34,35,36,37.