Fig. 1: Schematic illustrations of the switch.
From: Silicon photonic MEMS switches based on split waveguide crossings
a, b The split waveguide crossing (SWX) in the OFF and ON state, respectively. c Schematic diagram of the designed photonic and electromechanical structures. d Close-up view of the subwavelength-teeth (SWT) and mechanical stopper. e, f The SWX with SWT reflecting facets of the switch in the OFF and ON state, respectively.
