Fig. 4: Fabrication and measurement results of the 64\(\times\)64 switch array.
From: Silicon photonic MEMS switches based on split waveguide crossings
a The optical microscope image of the 64\(\times\)64 switch array. b, c, d Close-up view of a switch cell, connection shuffle (rotated by 90°) and varied-width multimode interference waveguide crossing, respectively. e The measured transmission Ti,j of the switch array in the all-OFF state. f Estimated and measured excess loss of the 64 optical paths in the all-OFF state at 1550 nm. g The measured transmission Ti,j in the OFF/ON states of corresponding output ports with a single switch cell in the center stage turned on.
