Fig. 3: Experimental validation of improved depth resolution using TCMEP.

a, b MEP (a) and TCMEP (b) reconstructed phase images from different depths (upper panels) with corresponding Fourier transforms (lower panels). Bragg peaks (yellow dashed circles) demonstrate the improvement in depth resolution. Scale bars, 1 nm (upper panels) and 4 nm−1 (lower panels). c Structural model of the twisted bilayer SrTiO3. d Phase profiles averaged from Sr and Ti columns in the bottom layer, fitted with Gaussian error functions (see Supplementary Fig. 5). TCMEP with a maximum tilt angle of 2° yields a depth resolution of approximately 0.9 nm at the interface. e Depth resolution as a function of maximum tilt angle for different lateral frequencies. Error bars are derived from residuals of curve fitting.