Fig. 6: Reflectivity spectrum validation.
a Experimental setup. Circ, circulator; PC, polarization controller; Col., collimator; Lin. Pol., linear polarizer; obj., objective; PD, photodetector. b 100 mm diameter wafer with 60 × 60 mm2 suspended PhC membrane clamped in the measurement setup. c Simulations from the actual fabricated design obtained from the scanning electron microscope (blue), measurement (orange) with respect to a silver mirror reference. d Schematic representation of the simulation. A small layer with a relative permittivity of (ϵSi + ϵvac)/255 is introduced to represent the rough surface resulting from the undercut of the SiN membrane.
