Fig. 8: Fabrication of cm-scale suspended photonic crystal membranes.

Schematic overview of the fabrication steps of the suspended PhC lightsail⁵⁴. a SiN (blue) positioned on a Si wafer with low-pressure chemical vapor deposition (LPCVD). b Patterning of the photoresist mask (red), c Directional C₂F₆ plasma etch, d Resist removal, e SF₆ undercut.