Fig. 1: MBHL concept.

a Schematic diagrams for the fabricated nanoaperture and substrate chips and their stack. The thickness of photoresist (green layer) on the substrate chip precisely defines the separation between the substrate surface and nanoaperture membrane, \(D\). b Illustration for the generation of angular molecular beam when placing a tilted chip stack on top of an evaporation source. For a given vapor particle transferring through the nanoaperture, the tilting angle \(\varphi\) makes the actual landing point deviate from the incidence point by a lateral offset \(R={R}_{{{{\rm{m}}}}}+{R}_{{{{\rm{i}}}}}+{R}_{{{{\rm{s}}}}}=(D+\delta )\tan \varphi+{R}_{{{{\rm{s}}}}}\). c Schematic illustration for an off-axis deposition system, which allows deposition from multiple coplanar evaporation sources of different \((\theta,\varphi )\) individually generating angular molecular beams superimposed on the substrate surface. Here we consider \(n\) evaporation sources evenly placed on the base circumference with an identical titling angle \(\varphi\) and a common rotating angle difference \(\Delta \theta=2{{{\rm{\pi }}}}/n\). d Consider a nanoaperture pattern consisting of honeycomb lattice of circular nanopores (white circles in \(n=1\) panel). When the offset \(R\) is comparable to the nanoaperture spacings, the superimposition of multiple molecular beams projected on the substrate surface yields the Moiré interference pattern. With increase of \({n}\), the calculated interference patterns become more and more complex, evolving from isolated hexagonal dots (\(n=1\)) to continuous 3D surfaces (\(n=\infty\)). Scale bars, center-to-center distance \(L\) of the honeycomb lattice. e Generalization of \(n=\infty\) interference. The angular material fluxes coming from all directions \((\theta,\varphi )\) correspond to a continuous incident trajectory in the polar coordinate system (green curve), which yields the offset trajectory, a circle of variable radius \(R\approx (D+\delta )\tan \varphi\), corresponding to the projection of incident trajectory to the top tangent plane (magenta curve).